Formation of Titanium Nitride Film by Ion Plating Technique Using Electron-Beam-Excited Plasma

Annealing effect on ion-beam-sputtered titanium dioxide film.

We found that the extinction coefficient of ion-beam-sputtered titanium dioxide films first decreased with increasing annealing temperature then increased drastically when annealing temperature was increased above ~200 degrees C for 24 h of annealing time. The decreasing extinction coefficient with annealing temperature was attributed to a reduction in absorption owing to oxidation of the film ...

Simulating a Maxwellian plasma using an electron beam ion trap

We describe a technique for producing a Maxwell–Boltzmann electron energy distribution using an electron beam ion trap ~EBIT!. The technique was implemented on the Lawrence Livermore EBIT to simulate Maxwellian plasmas. We discuss technical and experimental issues related to these simulations. To verify the fidelity of the quasi-Maxwellian, we have measured line emission due to dielectronic rec...

Silicon nitride films deposited with an electron beam created plasma

'G. C. Salter and R. E. Thomas, Solid State Electron. 20, 95 (1977). 2p. Van Halen, R. P. Mertens, R. J. Van Overstraeten, R. E. Thomas, and J. Van Meerbergen, IEEE Trans. Electron Devices ED.25, 507 (19781. -c. E. Norman and R. E. Thomas, IEEE Trans. Electron Devices ED-27, 731 (1980). 4R. E. Thomas, R. B. North, and C. E. Norman, IEEE Electron Device Lett. EDL-l, 79 (1980). Sp. DeVisschere, I...

Direct synthesis of titanium nitride by laser-plasma

Comparative study of IR and UV laser damage resistance of silica thin films deposited by Electron Beam deposition, Ion Plating, Ion Assisted Deposition and Dual Ion Beam Sputtering

The laser damage resistance of optical coatings is a critical point for a large number of applications. However improving this resistance is often hard to obtain because of the large number of parameters in the deposition processes than can modify the laser damage threshold and the lack of detailed and exploitable studies published on this subject. Then, the aim of this work is to test and anal...